Surface damage induced by mechanical polishing of cold–rolled and annealed Pd specimens was examined by cross–sectional electron backscatter diffraction
(EBSD) measurements. Fine grains with high–angle grain boundaries were detected in the outermost layer in both specimens. Less granular but layered gradation of
crystallographic orientation was detected in the sub–surface layer of the annealed specimen. In the cold–rolled specimen, a lot of elongated grains were detected in
the entire inner layer. The formation of the sub–surface layer seemed to be prevented in the cold–rolled specimen by pre–introduced microstructures. In the annealed
specimen, the depth of the surface damage layer was dependent on the crystallographic orientation of the matrix grain. This study clearly demonstrated the application
of cross–sectional EBSD analysis for evaluating surface damage in metallic materials.