A novel X-ray fluorescence (XRF) method is proposed in this study for quality inspection of thin Li metal
anodes. The method can be used to determine Li coating thickness and to calculate Li mass absorption
coefficient. The high correlation between the calculated Li mass absorption coefficient (263.9 cm2/g
and 259.7 cm2/g at 930 eV) and the reported values in literature (NIST 260.0 cm2/g and CRXO
279.2 cm2/g) indicates this method can be a promising quality inspection tool. The suggested XRF method
can also potentially be used to detect internal and surface defects in Li coatings, as well as to identify
chemical impurities. The XRF analysis method is non-destructive, non-contact, covers large areas, provides
compositional data and is amenable to online production. This study shows the potential of incorporating
XRF analysis system as a quality inspection tool for the commercialization and large-scale
manufacturing of Li metal anodes and next generation EV batteries.