Microtribology of silicon single crystals is one of the key technologies from the viewpoint of reliability of practical application in micro electro mechanical system
ÿMEMSÿ. In the study, a silicon single crystal ÿ100ÿ wafer was scratched by a silicon single crystal tip under a very small loading force in various atmospheres and
temperatures, which was characterized using an atomic force microscope. In air and wa-ter, the silicon single crystal tips were worn greatly. However, the
morphology of the scratched wafer surface was quite different; in air the scratched area of the wafer surface was forming a terrace. In vacuum, the tips were worn
slightly. In terms of the effects of temperature, the silicon single crystal softened at 473 K was worn. At 673 K, the silicon single crystal wafer was worn greatly and
stick-slip like phenomenon occurred between the silicon single crystals signicantly softened. As a result, microtribology is affected by atmospheres or temperatures.